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공정장비

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Plasma testing equipment

모델명 :
제품 견적문의

상품상세정보

This equipment is customized plasma testing equipment for customers. The main component of the equipment is an inductively coupled plasma generator. The generator can generate plasma in the quartz tube inside the inductance coil. The flanges on both sides of the quartz tube are equipped with observation windows. Users can observe experimental phenomena on the observation window or use other The instrument measures relevant parameters. The device is controlled by a touch screen, and the screen integrates all experimental functions, such as vacuum extraction, flow control, and RF power adjustment. At the same time, the inductance coil adopts water cooling design, and the outer casing has a cooling fan to ensure the stability of the whole equipment for a long time. This equipment is an indispensable instrument for the research of plasma-related properties in college laboratories.

Technical parameters of plasma testing equipment:

Item

Details

Supply voltage

AC220V, 50Hz

Maximum power

1KW

Coupling method

Inductive coupling

Quartz chamber

O.Dφ30mm x 150mm wall thickness 3.5mm

Observation window size

φ30mm

Vacuum interface

KF16

Air inlet interface

6.35mm ferrule connector

Mass flowmeter

Ar calibration range 100sccm

Vacuum pump

Bipolar rotary vane vacuum pump

Ultimate vacuum

0.1Pa

Cooling method

Water-cooled copper tube + air-cooled shell

RF power supply

Maximum output power 300W

Automatic matching

Overall size

560mm x 620mm x 620mm