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1200℃ low vacuum rotary CVD system with 3-channel float flowmeter CY-O1200-60IIIC-R

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The three temperature zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and open circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere environment in the pipeline.

If you need to maintain a single grain structure (such as when drying or calcining materials), a rotary tube furnace is ideal for you. The combination of continuous rotary motion and atmospheric protection of the furnace tube enables the mixing and mixing of the materials in the tube to achieve uniform heating effect, which will bring you the ideal treatment result.

1200℃ low vacuum rotary CVD system applications:

The main application fields of the equipment are: powder metallurgy, ceramics, refractory materials, lithium battery anode and cathode materials, new energy and other industries particle powder firing, calcining, determination of materials.

1200℃ low vacuum rotary CVD system technical parameters:

Vacuum tube   furnace

Max power

4.5kw

Tube material

High purity quartz

Tube diameter

60mm at both ends, 100mm in the middle

Tube length

1400mm

Furnace chamber   length

600mm

Heating zone   length

200mm+200mm+200mm

Operating   temperature

0～1100℃

Temperature   control accuracy

±1℃

Temperature   control mode

30 or 50 segment program temperature control

Display mode

Highlight digital display

Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V   50/60Hz

Inclination angle

0~15°

Rotating speed

0~20 rpm

Gas supply   system

Model

CY-3F

Gas channel

3-channel

Measuring unit

Gas float flowmeter

Measuring   range

A channel: 0～100ml  H2 gas

Remarks: If you need other ranges or gas types, you need to specify when ordering.   According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.

B channel: 16～160ml  N2   gas

C channel: 25～250ml  Ar gas

measurement   accuracy

±2.0%

Pipe   pressure resistance

3MPa

Working   pressure difference

50～300KPa

Connecting pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface   specification

1/4" ferrule connector for gas inlet and outlet

Exhaust   system

Mechanical   pump

Rotary vane pump

Pumping rate

1.1L/S

Exhaust   interface

KF16

Vacuum   measurement

Resistance gauge

Ultimate   vacuum

1.0E-1Pa

Power supply

AC:220V  50/60Hz

Pumping   interface

KF16