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1200℃ single heating zone high vacuum CVD system with 3-channel mass flow meter CY-O1200-50IT-3Z-HV

모델명 : CY-O1200-50IT-3Z-HV
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상품상세정보

1200℃ single heating zone high vacuum CVD system consists of a single heating zone tube furnace, a three-channel float flow meter and a high vacuum molecular pump set. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment raising and falling temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

This system is also equipped with a precision molecular pump set, which can achieve a vacuum of 1.0E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.

1200℃ single heating zone high vacuum CVD system applications:

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ single heating zone high vacuum CVD system technical parameters:

Vacuum tube furnace

Model

CY-O1200-50IT

Tube material

High purity quartz

Tube diameter

50mm (Optional 60mm/80mm/100mm)

Tube length

800mm

Furnace chamber length

440mm

Heating zone length

400mm

Constant temperature   zone

200mm

Operating temperature

0～1100℃

Temperature control accuracy

±1℃

Temperature control mode

30 or 50 segment program temperature control

Display mode

LCD

Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V 50/60Hz

Gas supply system

Model

CY-3Z

Gas channel

3-channel

Measuring unit

Gas mass flowmeter

Measuring range

A channel: 0～100 SCCM H2 gas

Remarks: If you need   other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas   type and range can be selected.

B channel: 0～300SCCM N2 gas

C channel: 0～500SCCM  Ar   gas

measurement accuracy

±1.0%F.S

Pipe pressure   resistance

3MPa

Working pressure  difference

50～300KPa

Connecting pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface specification

1/4" ferrule connector for gas inlet and outlet

Exhaust system

Model

CY-GZK103-A

Molecular pump

CY-600

Backing pump

Rotary vane pump

Pumping rate

Molecular pump: 600L/S

Comprehensive gas pumping performance: the vacuum can reach 1.0E-3Pa in 30 minutes.

Rotary vane pump: 1.1L/S

Pumping interface

KF40

Exhaust interface

KF16

Vacuum measurement

Compound vacuum gauge: Resistance gauge + ionization gauge

Ultimate vacuum

1.0E-5Pa

Power supply

AC:220V 50/60Hz