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1200℃ single heating zone low vacuum CVD system with 3-channel float flowmeter to supply gas CY-O1200-50IT-3F-LV

모델명 : CY-O1200-50IT-3F-LV
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상품상세정보

1200℃ single heating zone low vacuum CVD system consists of a single heating zone tube furnace, a three-channel float flow meter and a double stage rotary vane vacuum pump. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment raising and falling temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

1200℃ single heating zone low vacuum CVD system applications:

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ single heating zone low vacuum CVD system technical parameters:

Vacuum tube furnace

Model

CY-O1200-50IT

Tube material

High purity quartz

Tube diameter

50mm (optional 60mm/80mm/100mm)

Tube length

800mm

Furnace chamber length

440mm

Heating zone length

400mm

Constant temperature zone

200mm

Operating temperature

0～1100℃

Temperature control accuracy

±1℃

Temperature control mode

30 or 50 segment program temperature control

Display mode

LCD

Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" cutting sleeve joint, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V 50/60Hz

Gas supply system

Model

CY-3F

Gas channel

3-channel

Measuring unit

Gas float flowmeter

Measuring range

A channel: 0～100ml H2 gas

Remarks: If you need other ranges or gas types, you   need to specify when ordering. According to the customer's specific   requirements, the flow meter of the corresponding gas type and range can be   selected.

B channel: 16～160ml N2 gas

C channel: 25～250ml Ar gas

measurement accuracy

±2.0%

Pipe pressure resistance

3MPa

Working pressure difference

50～300KPa

Connecting pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface specification

1/4" ferrule connector for gas inlet and outlet

Exhaust system

Mechanical pump

Rotary vane pump

Pumping rate

1.1L/S

Exhaust interface

KF16

Vacuum measurement

Resistance gauge

Ultimate vacuum

1.0E-1Pa

Power supply

AC:220V 50/60Hz

Pumping interface

KF16