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1200℃ Two-zone Rotary PECVD tube furnace with three-channel MFC

모델명 :
제품 견적문의

상품상세정보

This product is a plasma-enhanced rotary chemical vapor deposition system (rotating PECVD). The furnace tube adopts a variable-diameter design. The middle tube diameter is relatively thick and there are mixing partitions, which can repeatedly mix powder or particles with the rotation of the furnace tube. The working tube can be rotated 360° uninterruptedly through the mechanical transmission control, so that the materials in the tube can be stirred and mixed to obtain a uniform heating effect; the equipment is also equipped with a plasma generator, which is connected to the furnace tube by inductive coupling, and the generated plasma can cover the furnace tube effectively, increase the activation energy of the reactants, reduce the reaction temperature, and improve the reaction efficiency. The equipment is equipped with a three-way mass flow meter and a gas mixing device, which can be used to pass a variety of gases into the pipe. At the same time, the equipment is equipped with a high-performance mechanical pump that can quickly evacuate the furnace pipe to vacuum; the cooperation of the pump and the gas circuit can achieve more CVD processes. The rotating device is very suitable for continuously coating and modifying powder materials by CVD method in an atmosphere protected environment. 

Technical parameters of Rotary PECVD tube furnace:

Dual temperature zone tube furnace

Product model

CY-O1200-60IIC-R

Equipment power

3KW

Furnace tube material

High purity quartz

Furnace tube size

Φ60*420+Φ100*360+Φ60*420mm   (Quartz heteromorphic tube)

Furnace chamber length

440mm

Heating zone length

200mm+200mm

Operating temperature

0～1150℃

Limit temperature

1200℃

Temperature control accuracy

±1℃

Thermocouple type

K-type thermocouple

Temperature control mode

30-segment program temperature control, PID parameter self-tuning

Display mode

HD full color LCD touch screen

Sealing method

304 stainless steel vacuum flange

Power supply

AC: 220V 50/60Hz

Rotation speed

0~13rpm

Tilt angle

0~35°

3-channel mass flow meter

Product model

CY-3Z

Number of gas paths

3 channels

Flowmeter type

Mass flowmeter

Measuring range

A channel: 0~100sccm; B channel: 0~200 sccm; C channel: 0~500 sccm

Measurement accuracy

±1.5%

Working pressure difference

0.1~0.5MPa

Pipeline interface

1/4 inch ferrule connector

Power supply

AC220V 50/60Hz

Vacuum system

Vacuum pump

Dual stage rotary vane pump

Pumping speed

1.1L/s

Pumping port

KF16

Pump ultimate vacuum

10E-1Pa

Power supply

AC220V 50/60Hz

RF power supply

Signal frequency

13.56MHz±0.005%

Power output range

0~500W

Maximum reflected power

100W

RF output interface

50Ω, N-Type, female

Power stability

≤5W