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1500℃ single heating zone low vacuum CVD system with 3-channel mass flowmeter CY-O1500-60IT-3Z-LV

모델명 : CY-O1500-60IT-3Z-LV
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상품상세정보

1500℃ single heating zone low vacuum CVD system consists of a 1500℃ single temperature zone tube furnace, a three-channel mass flowmeter and a double stage rotary vane vacuum pump. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment temperature rise and fall program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

The furnace tube is made of high-purity alumina, and the furnace body adopts integrated design. The unique design can ensure the system is stable and safe at 1500℃. The heating element is made of high-quality silicon carbon rod, which can reach 1500℃. If the customer has the need, the silicon molybdenum rod heating element can be customized to achieve a higher temperature of 1700℃.

1500℃ single heating zone low vacuum CVD system applications:

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1500℃ single heating zone low vacuum CVD system technical parameters:

Vacuum tube   furnace

Model

CY-O1500-60IT

Tube material

High purity alumina

Tube diameter

60mm (optional 50mm, 80mm, 100mm)

Tube length

1000mm

Furnace chamber   length

400mm

Heating zone   length

300mm

Constant   temperature zone

150mm

Operating   temperature

≤1450℃

Temperature   control accuracy

±1℃

Temperature   control mode

30 or 50 segment program temperature control

Display mode

LCD

Sealing   method

304 stainless steel vacuum flange

Flange   interface

1/4" ferrule connector, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V   50/60Hz

Gas supply   system

Model

CY-3Z

Gas channel

3-channel

Measuring   unit

Gas mass flowmeter

Measuring range

A channel: 0～100SCCM H2 gas

Remarks: If you need other ranges or gas types, you need to specify when ordering.   According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.

B channel: 0～300SCCM N2 gas

C channel: 0～500SCCM Ar gas

measurement  accuracy

±1.0%F.S

Pipe pressure resistance

3MPa

Working   pressure difference

50～300KPa

Connecting   pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface   specification

1/4" ferrule connector for gas inlet and outlet

Power supply

AC:220V   50/60Hz

Exhaust   system

Mechanical   pump

Rotary vane pump

Pumping rate

1.1L/S   

Exhaust   interface

KF16

Vacuum   measurement

Resistance gauge

Ultimate   vacuum

1.0E-1Pa

Power supply

AC:220V   50/60Hz

Pumping   interface

KF16