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공정장비

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Anti-Corrosion Three Channel Gas Mixing Control(MFC) Station for CVD System CY-3Z

모델명 : CY-3Z
제품 견적문의

상품상세정보

Application

1.Semiconductor manufacturing industry

2.Vacuum coating equipment

3.Special material surface treatment

4.Gas combustion control

5.Leakage detection system

6.Environment detection and analysis equipment

7.Chemical, petrochemical, metallurgy, optical fiber and etc

 

Model no.

CY-3Z

Flow meter type

mass flow

Flow meter pipe core material

304 stainless steel

Valve type

electromagnetic regulating valve

Pipeline normal condition

close

Gas way

3 gas way

Connector size

1/4"

Measurement accuracy

±1.0%F.S

Linearity

±0.5%F.S

Repeat accuracy

±0.2%F.S

Pressure range

-0.1~0.15Mpa

A way range

0~100SCCM

B way range

0~200SCCM

C way range

0~500SCCM

flow control range

2%-100%

Zero temperature drift

0.6F.S(15-35℃)

Respond time

2S

Working temperature

15-50℃

Working power

AC 220V 50-60Hz