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공정장비

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Compact CVD system with 1200°C tube furnace 3 gas way float flow controller-CY-O1200-50IC-3F

모델명 : CY-O1200-50IC-3F
제품 견적문의

상품상세정보

Furnaceparameters

FurnaceConstruction

•Highpurityceramicfiberinsulation(energysaving30%andweight
lighterabout30%thanoldfurnace).
•Doublelayerssteelcasingwithfancooling,toensurethe
surfaceoffurnacebelow50°C.
•Perfectsealingstainlesssteelflangewithblock.

ChamberSize

Φ50*1000mm,Φ60*1000mm,Φ80*1000mm,Φ100*1000mm
orascustomized

Power

0.8KW~10KW,baseontheheatingzonelength

Voltage

AC220V50/60Hz

Max.Temperature

1200°C(<2hour)

ContinuousWorkTemp.

1150°C

Max.HeatingRate

20°C/min

TemperatureController

•PIDautomaticcontrolandauto-tunefunction.
•30programmablesegmentsforprecisecontrol.
•Over-heatedandbrokenThermalcouple.
•DigitalcontrolpanelLEDbuttonorLCDtouchscreen

TemperatureAccuracy

+/-1°C

HeatingElement

Aludirome

ThermalCouple

Ktype

VacuumPump

·AC220V50Hz1/2HP375W
·2Liter/Sor120liter/m
·Oiltrap(inlet)andexhaustfilter(outlet)areinstalled.
·Max.vacuum:10-2torr

Float Flow Control

3 gas way
16~160,25~250,60~600ml/min as customized

Warranty

Oneyearlimitedwarranty(Consumablepartssuchasthermocouple,doorblockandheatingelements