Smile, Smart, Speed
고객의 만족을 위하여 최선을 다하는 기업, 정문사이언스입니다.
KOR
공정장비
HOME > 회사소개 >공정장비 
Compact CVD Tube Furnace with 2OD Quartz tube furnace and 3 gas mixer CY-O1200-50IS-3Z10V
상품상세정보
|
Model No. |
CY-O1200-50IS-3Z10V |
|
Display |
LED digital gauge |
|
Limiting temperature |
1200℃ |
|
Working temperature |
≤1100℃ |
|
Heating rate |
0-20℃/min |
|
Heating Zone length |
200mm, constant temperature zone:80mm |
|
Quartz tube diameter |
OD50*700mm |
|
Temperature accuracy |
± 1℃ |
|
Heating element |
Fe-Cr-Al alloy adopt by Mo |
|
Thermal couple |
K TYPE |
|
Cooling method |
Double layer structure with fan cooling |
|
Temperature control |
30 steps programmable PID control |
|
Chamber material |
Alumina fiber |
|
Vacuum pump |
Mechanical rotary vacuum
pump:10-2Torr |
|
Cooling method |
Air cooling |
|
Connection pipe |
stainless steel bellows, manual flap
valve |
|
Gas Mixer |
3 way gas mixer |
|
Working pressure： |
-0.1MPa~0.15MPa |
|
MFC1 Range |
0~100SCCM |
|
MFC2 Range |
0~200SCCM |
|
MFC3 Range |
0~500SCCM |
|
Working voltage |
AC220V,50Hz |
TEL : 02-565-7077 FAX : 02-563-7033 E-mail : jungmun@jungmun-science.co.kr
ⓒ 정문사이언스. All Rights Reserved. Designed by Website.co.kr
