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Laboraotry mini pecvd furnace with compact tube furnace,rf generator and gas mixer-CY-O1200-50IS-PECVD

모델명 : CY-O1200-50IS-PECVD

Model No.	CY-O1200-50IS-PECVD
RF frequency	13.56 MHz 0.005% stability
Output Power	5 -300W adjustable with ±1% stability
RF Output Port	50 Ω, N-type, female
Matching	Automatic
Display	LED digital gauge
Limiting temperature	1200℃
Working temperature	≤1100℃
Heating rate	0-20℃/min
Heating Zone length	200mm, constant temperature zone:80mm
Quartz tube diameter	OD50*1000mm
Temperature accuracy	± 1℃
Heating element	Fe-Cr-Al alloy adopt by Mo
Thermal couple	K TYPE
Cooling method	Double layer structure with fan cooling
Temperature control	30 steps programmable PID control
Chamber material	Alumina fiber
Vacuum pump	Mechanical rotary vacuum pump:10^-2Torr Turbo pump with rotary vacuum pump:10^-5Torr
Cooling method	Air cooling
Connection pipe	stainless steel bellows, manual flap valve
Gas Mixer	4 way gas mixer
Accuracy	±2％F.S.
Repeat accuracy	±0.2% FS
Linear precision	±1％F.S.
Working pressure：	-0.1MPa~0.15MPa
MFC1 Range	0~100SCCM
MFC2 Range	0~200SCCM
MFC3 Range	0~200SCCM
MFC4 Range	0~500SCCM
Working voltage	AC220V,50Hz