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Laboratory CVD Furnace with water cooling flange and two gas way mixer CY-O1200-50IT-2Z10V

모델명 : CY-O1200-50IT-2Z10V

Model No.	CY-O1200-50IT-2Z10V
Display	LCD Touch Panel
Limiting temperature	1200℃
Working temperature	≤1100℃
Heating rate	0-20℃/min
Heating Zone length	440mm, constant temperature zone:200mm
Quartz tube diameter	OD50*1000mm, 60/80/100/120mm for option
Temperature accuracy	± 1℃
Heating element	Fe-Cr-Al alloy adopt by Mo
Thermal couple	K TYPE
Cooling method	Double layer structure with fan cooling
Temperature control	30 steps programmable PID control
Chamber material	Alumina fiber
Over-temperature alarm	Yes
Over-current alarm	Yes
Sealing flange	Water cooling S.S vacuum flange
Vacuum pump	Mechanical rotary vacuum pump
Cooling method	Air cooling
Connection pipe	stainless steel bellows, manual flap valve
Gas Mixer	2 way gas mixer
Accuracy	±2％F.S.
Repeat accuracy	±0.2% FS
Linear precision	±1％F.S.
Working pressure：	-0.1MPa~0.15MPa
MFC1 Range	0~100SCCM
MFC2 Range	0~200SCCM
Working voltage	AC220V,50Hz