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PE-HPCVD (Plasma Enhanced Hybrid Physical Chemical Vapor Deposition) tube furnace

모델명 :
제품 견적문의

상품상세정보

This product is a 1200℃ plasma enhanced hybrid physical chemical vapor deposition (HPCVD) dual heating zone rotary tube furnace system. The equipment includes a dual heating zone tube furnace, a set of tungsten filament evaporation source, a set of plasma generator and a set of mass flowmeter system. Its working principle is to evaporate the reactant at the gas inlet end through the evaporation source and load it into the heating zone of the tube furnace through the airflow to carry out the CVD reaction. At the same time, the reaction is promoted by plasma enhancement. It is suitable for the heat treatment of inorganic composite powder and the surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).

Technical parameters:

Two heating zone tube furnace

Product model

CY-O1200-50IIT

Furnace tube material

High purity quartz

Tube diameter

50mm

Furnace tube length

1200mm

Furnace chamber length

440mm

Heating zone length

200mm+200mm

Operating   temperature

0～1100℃

Temperature control accuracy

±1℃

Temperature   control mode

30 or 50 segment program temperature control

Display mode

HD full color LCD touch screen

Sealing method

304 stainless steel vacuum flange

Power supply

AC: 220V 50/60Hz 2.5kw

RF output system

Power   range

0~500W adjustable

working   frequency

13.56MHz+0.005%

Working mode

Continuous output

Matched   impedance mode

It can be matched, and the glow is evenly distributed throughout the furnace   tube

Power stability

≤2W

Normal working reflected power

≤3W

Amplified   reflected power

≤70W

Harmonic   component

≤-50dBc

Overall efficiency

≥70%

Power Factor

≥90%

Supply   voltage/frequency

Single-phase AC (187V~153V) frequency 50/60Hz

Control mode

Internal control/PLC  analog quantity/RS232/485   communication

Power protection settings

DC over current protection, power amplifier over temperature protection, reflected power protection

Cooling method

Forced air cooling

Glow zone

Under Ar, the radio frequency power supply and the coil cooperate with the glow to fill the furnace tube

Evaporation boat

Working temperature

1300℃

Evaporation source

Tungsten wire basket, optional tapered alumina crucible

Thermocouple

S type thermocouple

Working current

≤30A

Max. power

500W

Gas delivery system

Flowmeter

Four-channel mass flowmeter

Flow range

MFC1 range: 0~200sccm MFC2 range: 0~200sccm

MFC3 range: 0~500sccm MFC4 range: 0~500sccm

Corresponding to gases H2, CH4, N2, Ar.

Measurement   accuracy

±1.5%F.S

Repeatability

±0.2%FS

Linear accuracy

±1%F.S.

Response time

≤4s

Work pressure

-0.15Mpa~0.15Mpa

Flow   control

LCD touch screen control, digital display, each channel gas contains needle valve for individually control.

Intake Interface

It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe

Outlet Interface

It can be connected with 1/4NPS or 6mm outer diameter stainless steel pipe

Connection   method

Double ferrule connector

Operating   temperature

5~45℃

Gas premix

Equipped with gas premixing device

Exhaust system

Product model

CY-GZK103-A

Molecular pump

Turbomolecular pump

Backing pump

Two-stage rotary vane pump

Pumping rate

Molecular pump: 600L/S

Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa

Rotary vane pump: 1.1L/S

Ultimate vacuum

5×10E-4Pa

Pumping port

KF40

Exhaust interface

KF16

Vacuum measurement

Compound vacuum gauge