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Small double furnaces sliding tube furnace CY-O1200-50SDM

모델명 : CY-O1200-50SDM
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The two furnace bodies can slide on the slide rails to achieve evaporation/sublimation of the raw materials and film deposition. To achieve the fastest heating, the furnace can be preheated to the set temperature and the furnace moved to the sample position. For the fastest cooling, the furnace can be moved to the other end after heating, which is the ideal furnace for low-cost rapid heat treatment.

At the same time, electric slide rails, mass flow meter (MFC) controlled gas supply system and plasma RF power supply can be selected to build the TCVD system.

The device can be used for graphene preparation, sulfide preparation, and the like.

Small double furnaces sliding tube furnace technical parameters:

Micro tube   furnace

Model

CY-O1200-50SDM

Tube material

High purity quartz

Tube diameter

50mm(optional 60mm, 80mm, 100mm)

Tube length

1400mm

Furnace chamber   length

300mm

Heating zone   length

200mm

Operating   temperature

0～1100℃

Temperature   control accuracy

±1℃

Temperature   control mode

30 or 50 segment program temperature control

Display mode

Highlight the digital tube digital display

Sealing   method

304 stainless steel vacuum flange

Flange   interface

1/4" ferrule connector, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V   50/60Hz

Gas supply   system

Model

CY-3F

Gas channel

3-channel

Measuring   unit

Gas mass flow meter

Measuring   range

A channel: 0～100SCCM H2 gas

Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.

B channel: 0～300SCCM N2 gas

C channel: 0～500SCCM Ar gas

measurement  accuracy

±1.0%F.S

Pipe pressure resistance

3MPa

Working pressure difference

50～300KPa

Connecting   pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface   specification

1/4" ferrule connector for gas inlet and outlet

Exhaust system

Mechanical pump

Rotary vane pump

Pumping rate

1.1L/S

Exhaust interface

KF16

Vacuum measurement

Resistance gauge

Ultimate vacuum

1.0E-1Pa

Power supply

AC:220V 50/60Hz

Pumping interface

KF16