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Compact 500W RF Generator with Auto Matching Network for RF Sputtering CY-RF500

모델명 : CY-RF500
제품 견적문의

상품상세정보

RF generator is  form a complete set of plasma power supply,it is composed by by the rf power source, impedance matching unit and the impedance of power meter

 

It is widely used for RF Sputtering, PECVD Chemical Vapor Deposition,and Reactive-ion Etching and etc.

 

Product Name

RF Generator

RF power

13.56MHz±0.005%

Output Power Range

0-500w, adjustable

Working mode

Continuous output

Display

LCD

RF output Impedance

N-type, female,50Ω

Power stability

≤2w

Maximum reflection power

200w

Componentes armonicos

<-50dBc

Response time

200ms

Control Mode

PLC/RS232/485

Tube Diameter

Φ50,60,80,100mm

Cooling method

Forced air cooling

Dimension

380*320*450mm

Gross weight

30kg