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Low Vacuum Laboratory Mini CVD Tube Furnace with Three Gas Channels

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Basic Info

Model NO.: CY-1200CVD
Structure: Desktop
Certification: CE, TUV
Type: Heating Type
Tube Material: High Purity Quartz
Chamber Material: Alumina Fiber
Thermcouple: K Type
Trademark: CY
Specification: OD. 60mm
HS Code: 85141090
Customized: Customized
Material: Steel
Application: School
Heating Zone: Single
Accuracy: +/-1c
Heating Element: Resistance Wire
Warranty: One Year
Transport Package: Wooden Box
Origin: Zhengzhou, China

Product Description

CYKY mini CVD tube furnace with 3 MFCS / CVD furnace system

The CY-1200CVD series furnace workstation consists of a CY-O1200 series mini tube furnace,a precision mass flow gas control station, a high vacuum station and other assembling parts. The max. working temperature of this workstation is 1200C. The ultimate vacuum rate goes to 10^-5 torr .The mass flow gas control station mixes three kinds of gas together and input the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.

Product	CY-1200CVD system
Chamber Type	Split Chamber
Display	LED digital display
Chamber Material	Alumina Fiber
Heating Element	Resistance wire
Max Temperature	1200°C
Usable Range	≤1100°C
Heating Rate	≤20°C(suggestion:10°C/min)
Heating Zone	Single
Heated length	220mm
Length constant temperature	100mm
Tube Material	High purity quartz
Tube Size	Φ50mm x700mm
Vacuum Seal	1.03×10-3Pa
Temperature Control	PID automatic control via SCR power control
Accuracy	±1°C
Preset curve	10
Thermocouple	K Type
Working Voltage	220V 50Hz~60Hz
Max. Power	1.8KW
Gas Channels	3 gas channels (can be designed as your requirement)
Gas controller	MFCS with range of 0 -500 sccm
Vacuum pump	10 Pa Rotary vacuum pump 10(-4) Pa high vacuum pump system

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