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Spectral Irrdiation System For Photoresist

모델명 : IUV-25CP
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This is the system that multiple monochromatic lights in a wavelength band (approx.240 nm) is irrdiated to photosensitive material such as photoresist agest for arbitraty time. Two types of light source are equipped as standard. One is the Deep UV lamp which can irrdiate strong line spectrum light and another is Xe lamp which can irradiate continuous spectrum light.

The sample can be moved stepwise on the automatic stage, and it can be irradiated while changing irradiation time.

 Catalog（PDF）

 

Features

     

    • Testing the spectral sensitvity (wavelength characteristics ) of photoresist agents can be performed.

     

    • The travel distance and the number of steps can be set to 5mm×13 stpes at maximum(2mm is required between irradiation areas )

     

    • The irradiation time and position can be set and controlled with the notebook PC and software.

     

    • The Deep UV lamp can be changed to an ultrahigh pressure mercury lamp as an option

     

     

    Image of Irrdiation

    		 

    Holder ( 2 types )

     

    		 

     

    Software

     

    • Start ( condition ) : Enter the first seconds of irradiation time ( 0.01 to 1200 )
    • End : Enter the last seconds of irrdiation time ( 0.01 to 1200 )
    • Number of divisions :Enter the number of division between start and end (2 to 13 )
    • Division method : Select from Linear or Log
    • Calculation : Set the irradiation time (seconds) under specifled conditions and display it in the list
    • Close : Close the irradiation conditions screen and returns to the main menu
    • Manual : Set shutter state and stage position arbitarily
    • Start (whole ) : Start Irrdiation under the set conditions

     

     

    Specifications

     

     Irrdiation Wavelength range Wavelength band irrdiated at once : about 240nm 
     Irrdiation area Long distance travel type. Height direction : 89mm (5×13 steo.space btween irradiation:2mm)
      WL direction : approx.80mm (approx.240nm)
     Irrdiation time 0.01～1200sec
     Min. setting time 0.01sec
     Irrdiation step 1～13 steps
     Direction fo divistion of irradiation Select either Linear or log
     Light source

     DeepUV lamp 500W・Xe lamp 500W

     Lamp swithcing Manural swithing with the mirror
     Sample holder □100mm、□127mm for glass plate ( exchange type )

     

     

    Standard Configurations

     

    ●Deep UV lamp 500W
    ●Deep UV lamp holder（air cooling type）
    ●Deep UV lamp power supply
    ●Xe lamp 500W
    ●Xe lamp holder（air cooling type）
    ●Xe lamp power supply
    ●Light condensing optical system（manual swithing of 2 light paths）
    ●Auto shutter mechanism
    ●M25-CP　Monochromator
    ●Grating 1200lines/300nmBlaze（MgF2 coating）
    ●Sample chamber（auto stage）
    ●Sample holder for glass sample,100×100mm
    ●Sample holder for glass sample,127×127mm
    ●Referebce detector (silicon photon diode with certificate)
    ●Ammeter for signal of reference detector （Electro meter）
    ●Stage controller
    ●Shutter controller
    ●Note PC
    ●Dedicated software
    ●Instruction Manual


     

    Outer Dimensions

     

    ●Main unit　　：approx. W1000×D650×H470mm
    　　　　　　　　＊Excluding lamp power suppley, controller, electro-meter