Smile, Smart, Speed

고객의 만족을 위하여 최선을 다하는 기업, 정문사이언스입니다.

HomeHOME > 회사소개 >

universal vacuum for plasma chemical deposition thermal spraying electron beam sputtering

모델명 :
제품 견적문의

상품상세정보

The universal vacuum post is intended for carrying out physical experiments at reduced pressure up to high vacuum - 5·10-7 mm. rt. Art. This vacuum post is excellent for physical deposition (PVD), chemical deposition (CVD), plasma chemical deposition (PECVD), thermal spraying, electron beam sputtering and many others. Also, the UVP-250 vacuum post can be adapted for research in the field of solid state physics when installing the appropriate equipment.The process of pumping and raising/lowering the vacuum chamber is controlled both in manual and automatic modes. The pressure and status of the vacuum post is displayed on the LCD display.

The vacuum chamber is made in the form of a cap. Chamber material - stainless steel 12X18H10T (AISI321). Rectangular cooling channels are welded on the chamber. The chamber flange has a lot of branch pipes for connecting various inputs: rotation, electrical, cryogenic. The vacuum post is equipped with an automated chamber lifting mechanism.

universal   vacuum

Inner diameter vacuum chamber

not less than, 250 mm

Height vacuum chamber

not less than, 400 mm

Camera type

Cylindrical bell-type

Chamber materia

Stainless steel, 12X18H10T

Processing the inner surface of the   chamber

Grinding, polishing

Pumping speed foreline pump

not less than,5 m3/h

Foreline pump type

Dry scroll

High vacuum pump type

Turbomolecular

Pumping speed high vacuum pump

not less than, 300l/s

Cooling system Serpentine

Fittings for inlet / outlet:1/4'

Working vacuum

1x10-6 mm Hg

Ultimate vacuum

5х10-7 mm. Hg

Time to reach working vacuum

no more than, 60 min

vacuum meter

type Combined wide range

Pressure measurement range

760 mm Hg

Bypass pumping line

yes

High vacuum valve Pneumatically operated

normally closed

Connecting flanges

KF16 – 2 pcs. KF25 – 6 pcs.

Vacuum system pressure and status   indication

Indication of pressure and status of the   vacuum system LCD screen on the control panel

Dimensions

width x depth x height, mm   1000x1200x1800(2400)

Weigh

no more 250KG

Power supply

220V

Number of power phases

1

Inlet air pressure

4-8 Bar

Power consumption

0.5KW