제주장학재단

3 inch three target magnetron sputtering coater

Three target magnetron sputtering coater is a cost-effective coating equipment independently developed by our company; it has standardization, modularization and customization. Three 3-inch magnetron sputtering target, one is high intensity magnetic target, two are permanent target

Three target magnetron sputtering coater is a cost-effective coating equipment independently developed by our company; it has standardization, modularization and customization. Three 3-inch magnetron sputtering target, one is high intensity magnetic target, two are permanent target; the power supply is two 500W DC power supply and one 300W RF power supply, the DC power supply can be used in the preparation of metal film, and the RF power supply can be used in the preparation of non-metal film, three target can meet the needs of multi-layer or multiple coating.

Three target magnetron sputtering coater equipment is equipped with two high-precision mass flow meters. If the customers has additional requirement, the gas path of up to four can be customized to meet the requirements of complex gas environment construction. The instrument is equipped with advanced turbo-molecular pumps, the ultimate vacuum can up to 1.0E-5Pa, while other types of molecular pump are available for purchase. The gas path of molecular pump is controlled by multiple solenoid valves, which can open the chamber to take out samples without turning off the pump, and can greatly improving your work efficiency. The product can be equipped with integrated industrial control computer to control the system, the most of function like the control to vacuum pump group and sputtering power supply can be realized in the computer program, it can further improve your experiment efficiency.

Three target magnetron coater application range:

The equipment can be used in the preparation of single or multilayer ferroelectric film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, oxide film, hard film, PTFE film and so on. Compared with similar equipment, the three target magnetron coater is not only widely used but also has the advantages of small volume and easy operation. It is an ideal equipment for preparing material film in the laboratory.

Three target magnetron sputtering coater technical paremeters: