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Plasma sputtering coater with a transposition and rotation sample stage

모델명 :
제품 견적문의

상품상세정보

This type of plasma sputtering machine adopts two-pole sputtering method, which is widely used for SEM sample preparation or metal coating test. Using low-temperature plasma sputtering process, there is no high temperature during the coating process, and it is not easy to produce thermal damage. This small plasma sputtering coater uses PLC control system, all touch screen operation, easy to learn and use. This equipment is equipped with a transposition autorotating sample stage. Users can realize one-key transposition on the touch screen. The sample stage can be freely switched between two target positions. After it is in place, the sample stage can also rotate to enhance the uniformity of the coating. In addition, customers can choose a crystal oscillator type film thickness meter to monitor the film thickness to improve the accuracy of the coating.

This equipment is small in size and beautiful in appearance and powerful in function. It is the best choice for laboratory coating test.

Technical parameters:

Item

Detail

Product model

CY-PLZ180-II-DC-Q

Sample stage

Diameter φ60mm, can automatically switch between two target positions

DC sputtering head

2"x1

Chamber material

High purity quartz

Chamber size

φ180mm x 150mm

Vacuum pump

Rotary vane pump

Ultimate vacuum

1.0E-1Pa

Vacuum interface

KF16  vacuum flange

Gas inlet

φ 6.35 ferrule connector

Power supply

AC 220V 50Hz

Total power

1.5KW/2KW (rotating heating)