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Composite Coating Instrument with Thermal Evaporation coater and Plasma Coater

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This dual-function coating instrument combines plasma sputtering and thermal evaporation, equipped with a DC sputtering target and thermal evaporation components. It is capable of both metal film coating through plasma sputtering and elemental thin film deposition through evaporation, such as carbon or other metals. The instrument features highly integrated components, enabling both coating functions within a single chamber. The coating instrument uses a 304 stainless steel chamber as the vacuum chamber, making the coating process fully visible. It comes standard with a dual-stage rotary vane vacuum pump, which can quickly achieve a vacuum level of 1.0E-4Pa, with an ultimate vacuum of 1.0E-5Pa, suitable for most evaporation coating experiments and DC sputtering experiments. The instrument is compact, space-saving, can be placed on a laboratory bench, and offers multiple functions in one machine, making it highly cost-effective and ideal for universities and research institutions.

Application Range of the Dual-Function Coating Instrument: The composite coating instrument with thermal evaporation and plasma coating is suitable for operations such as gold sputtering and carbon evaporation for scanning electron microscope (SEM) sample preparation, as well as for the preparation of electrodes for non-conductive material testing.

This instrument is highly recommended for use in various universities and research institutions.

Technical Parameters:

Product name

Thermal Evaporation coater and Plasma   Coater

Product model

CY-EVZ270-I-HP-SS

Sample stage

Position

Top settings

Dimensions

diameterφ150mm

Speed

0-20 rpm Adjustable

Adjustable temperature

≦500℃

Thermal evaporation source

Tungsten Boat

Evaporation power supply

Evaporation source with an independent   power supply

Sputtering power supply

DC power supply

Sputtering target

Quantity 2”×1

Vacuum chamber

Cavity size

Diameter φ273mm×H300mm

Observation window

Diameter φ80mm

Cavity material

304 stainless steel

Opening method

Front door

Film thickness measurement

Crystal film thickness measuring   instrument (film thickness controller is also optional)

Vacuum system

Foreline pump

Bipolar rotary vane pump, gas pumping   speed 1.1L/S

Secondary pump

Turbomolecular pump, gas pumping speed   60L/S

Vacuum measurement

Compound vacuum gauge (ionization gauge +   resistance gauge)

System vacuum

5×10-4Pa

Control System

CYKYSelf-developed professional-grade   controller

Other parameters

Power supply

AC220V,50Hz

Complete size

600mm×500mm×850mm

Complete power

7KW

Complete weight

120kg