제주장학재단

Product Name

Desktop thermal evaporation coater with quartz cavity

Product Model

CY-EVP180G-1S-A

Installation Condition

1、Working   environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh；

2、Equipment   power supply：AC220V，50Hz， must be well grounded；

3、Rated power：1200w；

4、Equipment for   gas ：The equipment   chamber should be filled with argon gas for cleaning. The customer should   prepare argon gas with purity ≥99.99%.

5、Table size   requirements: 600mm×600mm×700mm，bearing capacity ≥ 50kg；

6、The position   should be well ventilated and cooled.

Technical Indicators

1、 evaporation source voltage: 10V

2、 The evaporation current is continuously adjustable   from 0 to 100A

3、 With a tungsten boat, a tungsten basket;

4、  Stainless steel rotating upper sample table,   diameter of 60mm;

5、  The distance between the sample platform and   the evaporation source is adjustable from 60 to 100mm;

6、 The vacuum cavity is a quartz cavity with a diameter   of 180mm and a height of 200mm;；

7、 The air pumping interface of the vacuum chamber is   KF25

8、 Air intake interface is 1/4 inch double ferrule   joint

9、 Touch screen is 7inch color touch screen

10、 Adjustable sputtering current ，sputtering safety current value and safety vacuum   value can be set；

11、  safety protection: over current, vacuum is too   low automatically cut off the sputtering current

12、 Ultimate vacuum：5E-4Pa (matching molecular pump)；

13、 Vacuum measurement is Parana vacuum gauge ，the range is：1～105Pa

Notice

1. For the materials that   are sensitive to oxygen, it is recommended to add molecular pump group. 

2、In order to achieve a   high oxygen free environment, the vacuum chamber should be cleaned at least 3   times with high purity inert gas.

Optional   accessory

Film

thickness   Monitor

1、Film thickness resolution：0.0136Å（aluminum）

2、Accuracy of film   thickness ：±0.5%，it depends on process   conditions, especially sensor position, material stress, temperature and density    

3、Measuring speed：100ms to 1s per times ，measurement range can be   set ：500000Å（aluminum）

4、Standard sensor crystal：6MHz

5、Suitable for wafer   frequency：6MHz  

suitable for wafer size：Φ14mm

mounting flange：CF35

Another Accessory

1、tungsten boat, tungsten   basket;

2、Organic evaporation   source (including quartz boat and tungsten wire heating source)

3、CY-CZK103 series high   performance molecular pump set(including composite vacuum gauge, measuring   range 10-5Pa~105Pa);

CY-GZK60 series small molecular pump set(including   composite vacuum gauge, measuring range 10-5Pa~102Pa)

VRD-4 bipolar rotary vane   vacuum pump

4、KF25 Vacuum bellows; The   length can be 0.5m, 1m or 1.5m. KF25 clamp bracket;

5、Film thickness meter   crystal oscillator;