제주장학재단

Product   Name

Desktop thermal evaporation  coater with water cooled sample table

Product   Model

CY-EVP195S-2S-WT（T means tall tank；W means water cooled sample table）

Installation   Condition

1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh；

2、Equipment power supply：AC220V，50Hz， must be well grounded；

3、Rated power：2500w；

4、Equipment for gas ：The equipment chamber should be filled with argon   gas for cleaning. The customer should prepare argon gas with purity ≥99.99%.

5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 70kg；

6、The position should be well ventilated and cooled.

Technical   Indicators

1、  Number of evaporation sources: 2, each evaporation source is   equipped with baffle;

2、 Evaporation source voltage: 10V

3、 The evaporation current is continuously adjustable from 0 to 100A

4、 With two tungsten boat, two tungsten basket;

5、 Stainless steel water-cooled rotating upper sample platform, diameter   is 100mm, rotating speed 1~20rpm continuously adjustable;  

6、 The distance between the sample platform and the evaporation source is   300mm;

7、 The water cooling interface of the sample table is φ6mm quick plug   connector, which needs to be equipped with circulating water cooler. 

8、 The vacuum cavity is a stainless steel cavity with an outside diameter   of 195mm ,  an inside diameter 185mm   and a height of 350mm;

9、 Quartz observation window with baffle, size ofφ60mm

10、 The air pumping interface of the vacuum chamber is KF40;

11、 Air intake interface is 1/4 inch double ferrule joint ,stainless steel fine-tuning   valve is provided by default to adjust the air intake;

12、 Touch screen is 7inch color touch screen;

13、 Adjustable sputtering current ，sputtering   safety current value and safety vacuum value can be set；

14、  safety protection: over current, vacuum is too low automatically   cut off the sputtering current;

15、 Ultimate vacuum：1Pa(matching double stage rotary vane pump)；

16、 Vacuum measurement is Parana vacuum gauge ，the range is：1～105Pa

Notice

1、In order to give full play to the vacuum performance of the cavity, it   is recommended to use it with molecular pump group.

2、It is recommended to buy CW3000 water cooler or better circulation   water cooler.

Optional accessory

Film

thickness Monitor

1、Film thickness resolution：0.0136Å（aluminum）

2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material   stress, temperature and density  

3、Measuring speed：100ms to 1s per times ，measurement   range can be set ：500000Å（aluminum）

4、Standard sensor crystal：6MHz

5、Suitable for wafer frequency：6MHz

suitable   for wafer size：Φ14mm

mounting   flange：CF35

Another   Accessory

1、 tungsten boat, tungsten basket;

2、 Organic evaporation source (including quartz boat and tungsten wire   heating source)

3、 The number of evaporation sources can be selected 1~2 groups;

4、 CY-CZK103 series high performance molecular pump set(including   composite vacuum gauge, measuring range 10-5Pa~105Pa);

CY-GZK60 series small molecular pump set(including   composite vacuum gauge, measuring range 10-5Pa~102Pa)

VRD-4   bipolar rotary vane vacuum pump；

5、 CW3000 circulating water cooler(air cooled ,flow rate 10L per minute)

6、 KF40 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp   bracket;

7、 Film thickness meter crystal oscillator;