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Multi-source high vacuum evaporation coater

모델명 :
제품 견적문의

상품상세정보

This equipment is multi-source high vacuum evaporation coater, the equipment adopts the  front door vacuum chamber design, the chamber space is large, the expansibility is strong,  can meet the evaporation coating of multiple large size samples. The chamber is equipped  with an upper sample table, which can select the clamping or cassette type sample mounting  parts according to the user's sample style. The sample table can be rotated, heated and lifted, all operations are integrated through the touch screen control. The vacuum pump group of  the equipment is a two -stage vacuum system, which is composed of a bipolar rotary vane  vacuum pump and a turbomolecular pump, which can provide a clean and oil-free high  vacuum environment for vacuum coating test. The vacuum system contains a complete  pneumatic valve system, the user can through the touch screen for one -click operation to  achieve vacuum extraction, without stopping to take lofting, complete shutdown and other  operations.

The evaporation source of the equipment is two groups, taking tungsten boat evaporation source, water-cooled  copper  electrode,  can  support  the  maximum  300A  large  current, heating temperature up to 1800℃, can achieve a variety of refractory metal evaporation. The equipment adopts  the  integrated  design,  the  cavity  and  the  electric  control  part  are separated  from  each other,  which  realizes  the  separation  of  water  and  electricity,  and effectively ensures the safety of users. The electronic control part uses the combination of touch screen and button panel design, vacuum system, sample table and other auxiliary functions through the touch screen  one -click operation,  electrification  evaporation,  film thickness control through the panel independent operation, as convenient as possible to the user while  avoiding  the  possibility  of  misoperation. The  device  has  perfect  design  and superior performance, and is an essential choice for high-precision evaporation coating test in the laboratory.

 

Multi-source high vacuum evaporation   coating instrument

Sample Table

Measurements

φ150mm sample

Height

150mm adjustable up and down

Evaporation source

Quantity

Tungsten Boat x2

 

Vacuum chamber

Cavity size

Phi 350 x600mm

Viewing window

Front    φ100mm with blackout

Cavity material

304 stainless steel

Opening method

Front door opening type

Film thickness

control

Crystal vibration type film thickness   measuring instrument, optional multi-channel film thickness controller

Vacuum System

Forepump

Bipolar rotary vane pump

Air extraction

connector

KF16

Secondary pump

Turbo molecular pump

Pumping interface

ISO160

Vacuum

measurement

Resistance + ionization composite vacuum   gauge

Exhaust rate

Mechanical pump 1.1L/s Molecular pump   600L/s

Ultimate vacuum

1.0 e-5 Pa

Power supply

AC 220V 50/60Hz

Pumping rate

Rotary vane pump: 1.1L/S

Flowmeter

Optional one mass flowmeter 500sccm Ar   gas

Control system

PLC automatic control operation   interface: touch screen + operation panel

Other

Supply voltage

AC220V,50Hz

Overall dimensions

1200mm X 900mm X 1500mm

Machine weight

500kg

Machine power

5kW