상품상세정보
Precision temperature controlled hi-vacuum
thermal evaporating coater has a wide application range and can prepare
various metal thin films and organic thin films, and thus is widely used for
electrode preparation and preparation of organic light-emitting LEDs.This
equipment is small in size, which can effectively save laboratory space; it is
easy to operate and has strong adaptability to different materials, so it is
widely used in the laboratories of universities and research institutes.
Precision temperature controlled
hi-vacuum thermal evaporating coater features:
1. 6" OD x 10”H quartz chamber for
easy cleaning and sample loading
2. 2" Dia rotatable sample holder for
uniform film coating
3. Tungsten coil heater and alumina
crucible for high-temperature coating up to 1700℃
4. Precision temperature control with 30
programmable segments and +/- 1℃ accuracy
5. High vacuum can be achieved up to 1.0E-5
Torr via optional turbo pump
6. Gas flow port and valve are built in for
chamber purge and CVD possibility
Precision temperature controlled
hi-vacuum thermal evaporating coater specifications:
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Input Power
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- Input voltage: 208 - 240 VAC 50/60 Hz, single phase
- Input Power: 500 W
- Output Power : 40 A max current. Recommended working current
<30 A
- Power cable included without plug
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Temperature Control & Heaters
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- Tungsten coil heater with a thermocouple is built in at
the bottom of alumina crucible (for temperature control.
- Standard S type thermocouple (included and installed) -
heating from 200℃ - 1500℃
- Optional B-type thermocouple (at extra cost) - heating
from 1200 ºC - 1700℃
- One digital temperature controller with 30 programmable
segments and +/- 1℃accuracy
- The time settings of temperature controller are in seconds.
Recommend to limit the temperature heating / cooling rate to 0.3℃/s (or 20℃/min)
below 1200 ºC, and limit to 0.15 ℃/s (or 10℃/min) from 1200 - 1700℃
- For continuous heating above 1300℃,
please limit the operation time to less than 1 hour to preserve the
service life of bottom flange O-ring.
- For fast coating up to 2000℃, such as
needed in Carbon coating, the user can remove thermocouple, alumina
thermal block, and alumina crucible, load evaporation material directly
into the tungsten coil heater, and use current manual control mode.
- Four alumina crucibles (up to 1700℃)
and two tungsten coil heaters are included.
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Sample Holder
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- One 50 mm Dia. rotatable sample stage and its shutter
are installed on top flange.
- Rotating speed: 5 rpm
- The distance from sample holder to evaporation source is
adjustable from 40 mm to 85 mm
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Vacuum
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- KF25 vacuum port is installed to connect to a vacuum pump
- The highest vacuum may reach <4.0E-6 Torr by pumping
overnight with optional Turbomolecular pump
- A vacuum pump is required for coating. Please choose from the
following Product Options
- No vacuum pump. Anti-Corrosive Capacitance Diaphragm
Gauge is included for vacuum up to 1.0E-6 Torr.
- Double Stage Rotary Vane Vacuum Pump with vapor trap to
eliminate the oil mist, which can reach vacuum up to 1.0E-2 Torr for
evaporating noble metallic materials, such as gold, silver, and organic
materials. Anti-Corrosive Capacitance Diaphragm Gauge is
included.
- Compact Turbomolecular Vacuum Pump System is able to
provide vacuum level up to 2.0E-5 Torr for evaporating oxygen
sensitive materials, such as Al. Mg, Li, etc. A combined Pirani and
cold cathode gauge are included with pump to
measure vacuum up to 1.0E-8 Torr.
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Gas Inlet
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- 1/4 tube fitting is built in for chamber purge or forming gas
processing
- One needle valve is built-in to control gas flowing rate
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Quartz Chamber Dimension
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O.D.:165mm
I.D.: 150mm
Length: 250mm
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Warranty
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One year limited warranty
with lifetime support
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Net Weight
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50 kg
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