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Small two-in-one coating machine (plasma sputtering & thermal evaporation)

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The small plasma sputtering and evaporation two-in-one coating machine is equipped with DC sputtering target and thermal evaporation assembly, which can not only be used for metal film plating by plasma sputtering, but also obtain carbon or other metal elemental films by evaporation.

The instrument components are highly integrated, which realize two kinds of coating functions in the same chamber. This coating machine adopts high purity quartz chamber as vacuum chamber, and the coating process is completely visible. The instrument is equipped with two stage rotary vane vacuum pump, which can quickly reach the vacuum degree of 1.0E-1pa, and can meet the vacuum environment required by most evaporation coating experiments and diode sputtering experiments. This instrument has small size which can save space and can be used on the test bench. One machine has multiple purposes, which is cost-effective and very suitable for major universities and research institutions to choose.

Small two-in-one coating machine applications:

Scanning electron microscope sample surface gold spraying, gold steaming carbon spraying and other operations, as well as the production of non-conductor material test electrode.

Technical parameters:

Small two-in-one coating machine CY-EVS180G-LV

Sample Stage

Size

φ80mm

Distance to the evaporation source

20mm~50mm adjustable

DC sputtering head

Number

2” ×1

Evaporation system

Evaporation source

Tungsten wire basket

Max Temperature

1700℃

Thermal couple

S type thermocouple

Vacuum Chamber

Chamber Size

φ180mm×100mm

Watch Window

Omnidirectional transparency

Chamber Material

High purity quartz

Opening mode

Top cover removable

Vacuum System

Mechanical Pump

Rotary vane pump

Pumping connector

KF16

vacuum measurement

Resistance gauge

Exhaust connector

KF16

Ultimate vacuum

1.0E-1Pa

Power Supply

AC;220V 50/60Hz

Pumping rate

Rotary vane pump：1.1L/S  

Sputter Power Configuration

Number

DC power supply x1

Max Power Output

150w

 Other

Supply Voltage

AC220V,50Hz

Overall size

360mm×300mm×470mm

Total power

1.5kw

Total Weight

15kg