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Winding high vacuum evaporation coating instrument

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제품 견적문의

상품상세정보

This instrument is a high vacuum evaporation coating instrument, tungsten wire basket (or tungsten boat) used as the evaporation source, and the distance between the sample table and the evaporation source is adjustable. The instrument can steadily evaporate metals and certain organics. High vacuum stainless steel chamber, good sealing performance, good vacuum performance. The chamber is equipped with viewing Windows so that the coating process can be seen. The ultimate vacuum 10E-4Pa of the molecular pump system can effectively improve the coating quality and meet the vacuum environment required for most evaporative coating experiments.

High vacuum thermal evaporation coating instrument uses:

Coil evaporation coater can be used for film growth of different kinds of materials, most metals and some organic materials films, such as metals, semiconductors, oxides, etc.

High vacuum thermal evaporation coating instrument technical parameters:

Supply voltage

Single-phase, AC220V, 50Hz

Inner wall treatment

Electrolytic polishing

Cavity material

304 stainless steel

Cavity size

Horizontal Φ600mm x 500mm

Viewing window

Front φ100mm including shading plate

Opening mode

Front door type

Rewinding

Φ200mmx300mm

Speed

60m/min(adjustable)

Tension

Adjustable

Number of parts

1 set of metal evaporation source with   independent baffle

Electrode voltage

10V

Wire feed speed

≤3m/min

Evaporation current

The power is 2KW, the maximum current is 160A, and the adjustment accuracy   is 1A

Evaporator

Tungsten Boat, 1 count

Front pump

Bipolar rotary vane pump, pumping speed 1.1L/s

Turbomolecular pump

Pumping speed: 600L/s;

Rated speed: 24000rpm;

Startup time: ≦4.5min

Cooling mode: water cooling + air cooling

Intake interface: ISO150

Air outlet interface: KF40

Vacuum: 5.0*10-4Pa (5.0*10-6mbar)

Vacuum to 5.0×10-3 Pa (5.0*10-5mbar) for less than 40 minutes

Composite vacuum gauge

The measuring range is 105Pa~10-5Pa

Measurement accuracy

0.1Å

Measured velocity

100ms-1s/ time

Measurement range can be set

500000Å(aluminum)

Standard sensor crystal

6MHz

Applicable crystal size

Φ14mm (standard with 10 pieces)

Air compressor

Acting on electronically controlled pneumatic valve

Water cooler

Cooling water temperature: ≦37℃

Flow rate: 10L/min

Power: 0.1KW

Cooling power: 50W/ C

Tank capacity: 9L

Control system

PLC automatic control

Operation interface: Touch screen + operation panel