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Module Lminator(Off-Line)

모델명 :
제품 견적문의

상품상세정보

Features

 

Basic Function

Achieves ±2% temperature uniformity.

  • Achieves vacuum equivalent to 133 Pa or less within 120 seconds.

 

Safety

  • Area sensors are arranged at four points.
  • A mechanical locking structure using knock pins is adopted.

 

Operability

  • By adopting the one-touch clamp method (patented),
    diaphragm replacement time is reduced by 50%, and
    required man-hour is reduced by 85%.

    * in-house comparison with the conventional method

 

Effective Progressing Area