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1200℃ high-vacuum rapid annealing furnace

모델명 :
제품 견적문의

상품상세정보

The 1200℃ rapid annealing furnace is essentially a set of sliding tube furnace, which realizes the functions of heating and annealing. The intake end is equipped with a high-precision three-way mass flow meter to accurately control the atmosphere in the tube; at the same time, the equipment is equipped with a turbo molecular pump, which can quickly achieve a high vacuum environment and maximize the interference of the air atmosphere to the experiment.

The sliding furnace is composed of 1200℃standard single heating zone tube furnace and high precision slide rail. Tube furnace adopts resistance wire heating, combined with polycrystalline fiber furnace chamber, which has excellent temperature rise and thermal insulation performance. The slide rails are tightly matched, slide smoothly, and easy to operate. At the same time, it adopts full-color LCD touch screen operation, which is simple and intuitive, easy to use, can simplify the experimental operation and save the test time.

Technical Parameters of 1200℃ rapid annealing furnace:

Item

Detail

1200℃ Tube furnace

Voltage

AC220V,50Hz

Max power

4KW

Heating zone

Single zone 440mm

Working temperature

≤1200℃

Temperature control accuracy

±1℃

Temperature control method

AI-PID 30-stage process curve, can store multiple

Tube material

High purity quartz

Tube size

φ80mm I.D x 1000mm L

Sealing mode

Stainless steel vacuum flange

Vacuum measurement

Mechanical pressure gauge

Working gas

Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen

Three-way mass flowmeter

Valve type

Stainless steel needle valve

Gas channels

Three-way

Pressure range

0.05~0.3MPa

Range

0~100 SCCM (H2)

0~200 SCCM（Ar）

0~500 SCCM（CH4）

Flow control range

±1.5%

Mixing tank volume

750mL

Gas path material

304 stainless steel

Pipe interface

6.35mm Bite type joint

Power supply

AC220V 50Hz