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High vacuum mini CVD tube furnace

모델명 :
제품 견적문의

상품상세정보

This set CVD equipment is a miniaturized CVD system, the core of which is a mini tube furnace, which uses resistance wire heating, and the maximum temperature of the equipment can reach 1200℃. The instrument also contains a three-channel float flow meter and a molecular pump set, which respectively constitute the inlet and outlet gas parts of the CVD. There is a digital display vacuum gauge on the right side of the furnace tube to control the vacuum degree and atmosphere environment inside the furnace tube. The system adopts PID intelligent temperature control, and the temperature control accuracy can reach ±1℃.

The tube furnace adopts temperature control meter operation in operation, can preset the temperature control curve, one-button start and stop, easy to use, can simplify the experiment operation and save the experiment time. The high-vacuum molecular pump group can effectively increase the background vacuum and improve the quality of the reaction product.

High vacuum mini CVD tube furnace technical parameters:

1200℃ mini-tube furnace parameters

Supply voltage

AC220V, 50Hz

Maximum power

2KW

Heating zone

Single heating zone 200mm

Constant temperature zone head

100mm

Heating element

Heat-resistant alloy wire

Thermocouple

K type

Operating temperature

≤1150℃

Heating rate

Suggest ≤10℃/min

Temperature control accuracy

±1℃

Temperature control method

AI-PID 30-segment process curve, with overheat and thermocouple failure protection

Furnace tube material

High purity quartz

Furnace tube size

φ50mm O.D x 450mm L

Vacuum pump

Mechanical pump pumping speed 1.1L/s

Ultimate vacuum

5Pa

Three-channel float flowmeter parameters

Valve type

Stainless steel needle valve

Number of gas paths

Three

Pressure range

0.05~0.3MPa

Range

160   SCCM (Air)

Mixing tank volume

750mL

Gas path material

304 stainless steel

Pipe interface

6.35mm ferrule connector

Molecular pump parameters

Product number

CY-GZK103-A

Molecular pump

Turbomolecular pump

Backing pump

Two-stage rotary vane pump

Pumping rate

Molecular pump: 6000L/S

Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa

Rotary vane pump: 1.1L/S

Ultimate vacuum

5×10E-4Pa

Pumping port

KF40

Exhaust interface

KF16

Vacuum   measurement

Compound vacuum gauge