정문사이언스

제품정보

Product Information

HOME > 회사소개 >

Laboratory 1200°C CVD Tube Furnace with 4 Channel MFC Gas Mixer and Vacuum Pump CY-O1200-60IT-4Z10V

모델명 : CY-O1200-60IT-4Z10V

Model No.	CY-O1200-60IT-4Z10V
Display	LCD Touch Panel
Limiting temperature	1200℃
Working temperature	≤1100℃
Heating rate	0-20℃/min
Heating Zone length	440mm, constant temperature zone:200mm
Quartz tube diameter	OD60*1000mm
Temperature accuracy	± 1℃
Heating element	Fe-Cr-Al alloy adopt by Mo
Thermal couple	K TYPE
Cooling method	Double layer structure with fan cooling
Temperature control	30 steps programmable PID control
Chamber material	Alumina fiber
Over-temperature alarm	Yes
Over-current alarm	Yes
Sealing flange	S.S vacuum flange
Vacuum pump	Mechanical rotary vacuum pump(optional)
Cooling method	Air cooling
Connection pipe	stainless steel bellows, manual flap valve
Gas Mixer	4 way gas mixer
Accuracy	±2％F.S.
Repeat accuracy	±0.2% FS
Linear precision	±1％F.S.
Working pressure：	-0.1MPa~0.15MPa
MFC1 Range	0~100SCCM
MFC2 Range	0~200SCCM
MFC3 Range	0~200SCCM
MFC4 Range	0~500SCCM
Working voltage	AC220V,50Hz

제주장학재단