Smile, Smart, Speed

고객의 만족을 위하여 최선을 다하는 기업, 정문사이언스입니다.

HomeHOME > 회사소개 >

PECVD tube furnace with roll to roll system

모델명 :
제품 견적문의

상품상세정보

The instrument is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system. It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil.

The equipment is composed of five parts: a roll-to-roll movement system, 1200℃2-heating-zone open tube furnace, PE plasma enhancement system, vacuum system and three-channel mass flowmeter gas mixer system. The whole machine can work in the vacuum / atmosphere protection environment.

The speed of the winding device can be adjusted from 1 to 400mm / min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation and ensure the speed stability of the sample, thus ensuring the accuracy of the experiment.

Technical parameters of roll to roll PECVD tube furnace:

1200℃ Two-heating-zone tube furnace

Voltage

AC220V,50Hz

Max power

3KW

Heating zone

Dual zones 200mm+200mm

Working temperature

≤1200℃

Temperature accuracy

±1℃

Temperature control method

AI-PID 30-stage process curve, can store multiple

Tube material

High purity quartz

Tube size

φ80mm I.D x 1400mm L

Sealing mode

Stainless steel vacuum flange

Vacuum measurement

Resistance gauge

Working gas

Non-corrosive gases such as hydrogen, nitrogen,   argon, and oxygen

Vacuum pump

Bipolar rotary vane vacuum pump

Ultimate vacuum

10^-1Pa

Three-channel mass flowmeter

Valve type

Stainless steel needle valve

Gas channels

Three-way

Pressure range

0.05~0.3MPa

Range

0~100 SCCM (Ar)

0~200 SCCM(H2)

0~500 SCCM(CH4)

Flow control range

±1.5%

Mixing tank volume

750mL

Gas path material

304 stainless steel

Pipe interface

6.35mm Bite type joint

Power supply

AC220V 50Hz

RF power

Output Power

500W

Output accuracy

±1%

RF frequency

13.56MHz

RF stability

±0.005%

Cooling method

Water cooling